- raster scan e-beam system
- установка электронно-лучевой литографии с растровым сканированием
English-Russian dictionary of microelectronics. 2014.
raster scan e-beam system
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Lithographie a faisceau d'electrons — Lithographie à faisceau d électrons L utilisation d un faisceau d électrons pour tracer des motifs sur une surface est connue sous le nom de lithographie par faisceau d électrons. On parle également de lithographie électronique. Par rapport à la… … Wikipédia en Français
